Inspection de Wafer par MEB

Équipement Semi-conducteur

Outils d'examen de masque pour
améliorer la gestion du rendement,
permettant de détecter rapidement les
imperfections
et les défauts rédhibitoires.

WM-7 Wafer Surface Inspector
Wafer surface inspector WM-7Détail Wafer surface inspector WM-7

The world’s first Violet-LD wafer surface analyzer, the WM-7 offers high performance at a low investment price and low operating cost. The WM-7 Features high accuracy, real-time particle counting for wafers ranging from 50mm to 200mm in diameter.

Features:

  • Violet Laser Diode
  • Wafer sizes ranging from 50 mm to
  • 200mm
  • High performance and small footprint
  • Particle information with higher accuracy provided via realtime
  • counting process
  • A variety of options:
    • automatic detectivity adjustment
    • edge chuck
    • communication with host
JEOL USA is pleased to represent Topcon semiconductor equipment with North American sales and award-winning service support.